DIGITIMES / DigiTimes: IT news from Asia
Entegris licenses RSP and EUV technology to Gudeng – Entegris has announced it has agreed to settle patent litigation and disputes with Gudeng Precision related to reticle pod technology for both conventional and EUV lithography. The resulting license agreements, the terms of which are confidential, resolve pending legal cases, including the appeal of a judgement against Gudeng that awarded …
